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Microelectronics Materials and Devices
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Introduction3 Topics
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Crystal Structure17 Topics
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Semiconductor Devices in Microelectronics
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Atom Arrangement (Carbon) vs Material Property
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Crystal Structure and Ordering
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Crystal Structure
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Cubic Lattices
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Derivatives of FCC Lattices
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Hexagonal Lattices
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Cubic Close Packing
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Hexagonal Close Packing
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Atomic Packing Factor
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Planes and Directions
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Directions in Crystal
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Applications of Miller Indices: Si Wafers
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Crystallographic Orientation
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Crystal Plane and Crystal Direction
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Experimental Determination of Crystal Structure & Properties
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Summary and Learning Outcomes
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Semiconductor Devices in Microelectronics
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Energy Bands
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Dielectrics and Other Non-semiconductor Materials
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Semiconductors
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P-N Junctions
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MOS Capacitors
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Metal Semiconductor Contacts
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The direction of the crystal plane is represented by the normal vector to the plane (enclosed in square brackets)
Example: Crystal Directions
Note that a plane & the direction normal have precisely the same indices —just change the bracket.
Crystal-direction vector
- For a cubic crystal, the angle θ between directions
the above equation is established by forming the dot product between the two direction vectors
r1 = h1a + k1b + l1c and r2 = h2a + k2b + l2c
Summary on the Notation of crystallographic planes and directions
- A particular crystal plane, e.g. (001) round bracket
- A family of equivalent planes: e.g. curly bracket {001}
- A particular crystal direction, e.g. [001] square bracket
- A family of directions: e.g. <001> angle bracket